详细信息
Band offsets of La2O3 films on Ge substrates grown by radio frequency magnetron sputtering ( EI收录)
文献类型:期刊文献
英文题名:Band offsets of La2O3 films on Ge substrates grown by radio frequency magnetron sputtering
作者:Liu, Qiya[1,2]; Fang, Zebo[1]; Liu, Shiyan[1]; Tan, Yongsheng[1]; Chen, Jiajun[2]
机构:[1] Department of Physics, Shaoxing University, Shaoxing, Zhejiang 312000, China; [2] College of Physics and Electronic Information, China West Normal University, Nanchong, Sichuan 637002, China
年份:2014
卷号:116
起止页码:43
外文期刊名:Materials Letters
收录:EI(收录号:20134717016456)、Scopus(收录号:2-s2.0-84887854954)
语种:英文
外文关键词:High-k dielectric - Germanium - Energy gap - Lanthanum oxides - Spectrum analysis - Energy dissipation - Gate dielectrics - Heterojunctions - Radio waves
外文摘要:La2O3 films were grown on Ge substrates by radio frequency magnetron sputtering technique. The band alignment of the La 2O3/Ge heterojunction was analyzed by X-ray photoelectron spectroscopy. The valence-band and the conduction-band offsets of La 2O3 to Ge are found to be -2.76±0.1 eV and 1.75±0.3 eV, respectively. Based on O 1s energy loss spectrum analysis, it can be noted that the energy gap of La2O3 is 5.18±0.2 eV. According to the suitable band offset and large band gap, it can be concluded that La2O3 could be a promising candidate to act as high-k gate dielectrics. ? 2013 Elsevier B.V. All rights reserved.
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