文献类型：期刊文献

中文题名：Optical constants of Er_2O_3-Al_2O_3 films studied by spectroscopic ellipsometry

英文题名：Optical constants of Er2O3-Al2O3 films studied by spectroscopic ellipsometry

作者：Zhu Yanyan[1];Fang Zebo[2];Xu Run[3]

机构：[1]Shanghai Univ Elect Power, Dept Math & Phys, Shanghai 200090, Peoples R China;[2]Shaoxing Univ, Dept Phys, Shaoxing 312000, Peoples R China;[3]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China

年份：2011

卷号：29

期号：10

起止页码：958

中文期刊名：稀土学报：英文版

外文期刊名：JOURNAL OF RARE EARTHS

收录：CSTPCD、、EI(收录号：20114714541056)、Scopus(收录号：2-s2.0-81355151107)、CSCD2011_2012、CSCD

基金：Project supported by the National Natural Science Foundation of China (11004130 and 60806031), and the Key Fundamental Project of Shanghai (10JC1405900)

语种：英文

中文关键词：Er2O3;Al2O3;椭偏光谱;光学常数;Si(001)衬底;薄膜;太阳能电池;磁控技术

外文关键词：optical properties; rare earth oxides; solar cells

中文摘要：Er2O3-Al2O3 film was deposited on the Si(001) substrate by radio frequency magnetron technique at room temperature.The samplewas annealed at 450,600 and 750 oC for 30 min in O2 ambience,respectively.The optical constants were studied by spectroscopic ellipsometryfor both the as-deposited and the annealed samples.The proper values of refractive index indicated that it could be a useful material for solar cells.

外文摘要：Er2O3-Al2O3 film was deposited on the Si(001) substrate by radio frequency magnetron technique at room temperature. The sample was annealed at 450, 600 and 750 degrees C for 30 min in O-2 ambience, respectively. The optical constants were studied by spectroscopic ellipsometry for both the as-deposited and the annealed samples. The proper values of refractive index indicated that it could be a useful material for solar cells.