文献类型：期刊文献

中文题名：低温磁控溅射制备CdS薄膜的结构和光学特性(英文)

英文题名：Structural and optical properties of CdS thin films prepared by RF sputtering

作者：朱燕艳[1];徐闰[2];方泽波[3]

机构：[1]上海电力学院数理学院;[2]上海大学材料系;[3]绍兴文理学院物理系

年份：2014

卷号：33

期号：1

起止页码：40

中文期刊名：红外与毫米波学报

外文期刊名：Journal of Infrared and Millimeter Waves

收录：SCI-EXPANDED(收录号：WOS:000332438600006)、CSTPCD、、北大核心2011、EI(收录号：20141217481917)、Scopus(收录号：2-s2.0-84896045116)、WOS、北大核心、CSCD、CSCD2013_2014

基金：Supported by the National Natural Science Foundation of China under grant No. 11004130(The physical properties of erbium oxide selective emitters and antireflection coatings), and Shanghai Educational Commission under Grant No. 12zz175 (Study on the physical properties of selective emitters of rare earth oxides).

语种：中文

中文关键词：磁控溅射;太阳能电池

外文关键词：CdS; magnetron sputtering; solar cell

中文摘要：用磁控溅射的方法在透明导电氧化物衬底上制备了CdS薄膜,制备时的衬底温度为30 ～ 200℃.X射线衍射测试结果表明在这一条件下制备的CdS薄膜是六角纤锌矿的多晶结构.扫描电子显微镜结果显示薄膜具有较好的晶体质量,这一结论也和拉曼光谱、紫外-可见吸收光谱、光致发光光谱的结果一致.拉曼光谱显示CdS薄膜内部的压应力随着制备温度的提高而增大.

外文摘要：Cadmium sulfide thin films were grown on transparent conductive oxide coated glass substrates by radio frequency magnetron sputtering with a substrate temperature ranging from 30 ℃ to 200 ℃. X-ray diffraction measurements reveal that cadmium sulfide films were polycrystalline with the hexagonal wurtzite structure. The scanning electron microscope images show a good crystalline quality of the films which can also be confirmed by the Raman spectra, ultraviolet-visible absorption spectra and the photoluminescence spectroscopy. The Raman spectra measurements indicate that the compressive stress in the CdS films increases with increasing growth temoerature.