文献类型：期刊文献

中文题名：Amorphous Er_2O_3 films for antireflection coatings

英文题名：Amorphous Er2O3 films for antireflection coatings

作者：Zhu Yan-Yan[1];Fang Ze-Bo[2];Liu Yong-Sheng[1]

机构：[1]Shanghai Univ Elect Power, Shanghai 200090, Peoples R China;[2]Shaoxing Univ, Dept Phys, Shaoxing 312000, Peoples R China

年份：2010

卷号：19

期号：9

中文期刊名：中国物理B：英文版

外文期刊名：CHINESE PHYSICS B

收录：CSTPCD、、Scopus、CSCD2011_2012、CSCD

基金：Project supported by the Special Project of Shanghai Nano-technology (Grant No. 0852nm02400), the National Natural Science Foundation of China (Grant Nos. 10804072 and 60806031), and the Key Fundamental Project of Shanghai (Grant No. 08JC1410400).

语种：英文

中文关键词：Er2O3;抗反射涂层;薄膜;Si(001)衬底;射频磁控溅射技术;太阳能电池;非晶;工作波长

外文关键词：Er2O3 film; optical constants; insulators; solar power

中文摘要：This paper reports that stoichiometric, amorphous, and uniform Er2O3 films are deposited on Si(001) substrates by a radio frequency magnetron sputtering technique. Ellipsometry measurements show that the refractive index of the Er2O3 films is very close to that of a single layer antireflection coating for a solar cell with an air surrounding medium during its working wavelength. For the 90-nm-thick film, the reflectance has a minimum lower than 3% at the wavelength of 600 nm and the weighted average reflectances (400-1000 nm) is 11.6%. The obtained characteristics indicate that Er2O3 films could be a promising candidate for antireflection coatings in solar cells.

外文摘要：This paper reports that stoichiometric, amorphous, and uniform Er2O3 films are deposited on Si(001) substrates by a radio frequency magnetron sputtering technique. Ellipsometry measurements show that the refractive index of the Er2O3 films is very close to that of a single layer antireflection coating for a solar cell with an air surrounding medium during its working wavelength. For the 90-nm-thick film, the reflectance has a minimum lower than 3% at the wavelength of 600 nm and the weighted average reflectances (400-1000 nm) is 11.6%. The obtained characteristics indicate that Er2O3 films could be a promising candidate for antirefiection coatings in solar cells.